Study of the differential constant-angle interferometric system for measuring arbitrary angles and its self-calibration

Guijun Ji; Xiaotang Hu; Chun-Hai Wang; Guoxiong Zhang

doi:10.1117/12.156398

22 September 1993 Study of the differential constant-angle interferometric system for measuring arbitrary angles and its self-calibration

Guijun Ji, Xiaotang Hu, Chun-Hai Wang, Guoxiong Zhang

Author Affiliations +

Proceedings Volume 2101, Measurement Technology and Intelligent Instruments; (1993) https://doi.org/10.1117/12.156398
Event: Measurement Technology and Intelligent Instruments, 1993, Wuhan, China

Abstract

In this paper, a differential constant angle interferomethc system for measuring arbitrary angles, based on the principle of the differential constant angle interferometer in combination with the laser interferometer for measuring small angles, is proposed. The system comprises a two-stage precise rotary table, an optical polygon, two differential constant angle interferometers, a laser interferometer for measuring small angles and a data processing system for interferometric fringes. In accordance with the characteristics of the differential constant angle interferometric system for measuring arbitrary angles, a theory of self-calibration is proposed including determining the equivalent parameters of the laser interferometer for measuring small angles, calibrating the optical polygon by using the method of the correlative differential constant angle and so on. High accuracy, self-calibration ability and new measuring principles, are the distinguished features of the differential constant angle interferometric system for measuring arbitrary angles. A series of experiments show that the differential constant angle interferometric system for measuring arbitrary angles gives an accuracy better than 0.3" in measuring arbitrary angles ranging from deg; to 360°.

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Guijun Ji, Xiaotang Hu, Chun-Hai Wang, and Guoxiong Zhang "Study of the differential constant-angle interferometric system for measuring arbitrary angles and its self-calibration", Proc. SPIE 2101, Measurement Technology and Intelligent Instruments, (22 September 1993); https://doi.org/10.1117/12.156398

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