Pattern projection by diffractive and conventional optics: a comparison

Christiaan H. F. Velzel; Frank Wyrowski; Hans van Esdonk

doi:10.1117/12.178074

17 June 1994 Pattern projection by diffractive and conventional optics: a comparison

Christiaan H. F. Velzel, Frank Wyrowski, Hans van Esdonk

Proceedings Volume 2152, Diffractive and Holographic Optics Technology; (1994) https://doi.org/10.1117/12.178074
Event: OE/LASE '94, 1994, Los Angeles, CA, United States

Abstract

Diffractive optics can be used for the projection of patterns in, for instance, laser material processing or microlithography. We compare diffractive optics with conventional pattern projection methods with respect to efficiency, resolution and field, influence of coding and illumination. We describe an experiment in diffractive pattern projection with an excimer laser.

Citation Download Citation

Christiaan H. F. Velzel, Frank Wyrowski, and Hans van Esdonk "Pattern projection by diffractive and conventional optics: a comparison", Proc. SPIE 2152, Diffractive and Holographic Optics Technology, (17 June 1994); https://doi.org/10.1117/12.178074

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available