Excimer-induced alumina surface restructuring

Konstantin Kolev; Lucien Diego Laude; Michel Brunel

doi:10.1117/12.184773

7 September 1994 Excimer-induced alumina surface restructuring

Konstantin Kolev, Lucien Diego Laude, Michel Brunel

Proceedings Volume 2207, Laser Materials Processing: Industrial and Microelectronics Applications; (1994) https://doi.org/10.1117/12.184773
Event: Europto High Power Lasers and Laser Applications V, 1994, Vienna, Austria

Abstract

Irradiation of sintered Al₂O₃ plates has been performed using an excimer laser ((lambda) equals 248 nm) and the resulting structural transformation occurring at and near the surface of the plates has been characterized. Low-angle X-ray diffraction reveals a sequence of surface structural modifications which are correlated with the actual energy injection into the material (laser fluence and number of pulses) and the occurrence of very large energy gradient between surface and bulk. At low fluence, surface roughness is increased without any evolution of the initial (alpha) -alumina phase of the materia. Increasing the laser power density results in (gamma) -alumina formation near and at the surface of the plates.

Citation Download Citation

Konstantin Kolev, Lucien Diego Laude, and Michel Brunel "Excimer-induced alumina surface restructuring", Proc. SPIE 2207, Laser Materials Processing: Industrial and Microelectronics Applications, (7 September 1994); https://doi.org/10.1117/12.184773

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