Structural change in sol-gel-derived SiO2 films using ultraviolet irradiation

Hiroaki Imai; Hiroshi Hirashima; Koichi Awazu; Hideo Onuki

doi:10.1117/12.189015

13 October 1994 Structural change in sol-gel-derived SiO₂ films using ultraviolet irradiation

Hiroaki Imai, Hiroshi Hirashima, Koichi Awazu, Hideo Onuki

Proceedings Volume 2288, Sol-Gel Optics III; (1994) https://doi.org/10.1117/12.189015
Event: SPIE's 1994 International Symposium on Optics, Imaging, and Instrumentation, 1994, San Diego, CA, United States

Abstract

Photo-induced changes in structure of sol-gel derived SiO₂ films were studied in order to explore a possibility of densification of sol-gel films at room temperature using energetic photons. Gel films which were produced on silicon substrates by dip-coating of sols prepared through hydrolysis of tetraethoxysilane were subjected to synchrotron radiation at room temperature. Structural changes of the gel films were investigated by ellipsometry and infrared spectroscopy. The radiation resulted in an increase in refractive index, a decrease in thickness of the films and a loss of OH groups. Increase in temperature of the films was less than 50 degree(s)C during the irradiation. The results indicate that ultraviolet lights induce densification of gel films through electronic excitation.

Citation Download Citation

Hiroaki Imai, Hiroshi Hirashima, Koichi Awazu, and Hideo Onuki "Structural change in sol-gel-derived SiO₂ films using ultraviolet irradiation", Proc. SPIE 2288, Sol-Gel Optics III, (13 October 1994); https://doi.org/10.1117/12.189015

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