Pulse-modulated infrared-laser interferometric thermometry for Si substrate temperature measurement

Jun Kikuchi; Ryo Kurosaki; Shuzo Fujimura; Hiroshi Yano

doi:10.1117/12.186778

16 September 1994 Pulse-modulated infrared-laser interferometric thermometry for Si substrate temperature measurement

Jun Kikuchi, Ryo Kurosaki, Shuzo Fujimura, Hiroshi Yano

Proceedings Volume 2336, Manufacturing Process Control for Microelectronic Devices and Circuits; (1994) https://doi.org/10.1117/12.186778
Event: Microelectronic Manufacturing, 1994, Austin, TX, United States

Abstract

We present a simple optical interferometric technique for measuring temperatures of semiconductor substrates. This technique determines the direction of temperature change from two interferograms, one is an original interferogram and the other is a slightly phase-shifted interferogram due to a small decrease in a wavelength of a pulse- modulated infrared semiconductor laser immediately after the laser was turned on. We measured temperature of a Si wafer during an arbitrary change of heating and cooling.

Citation Download Citation

Jun Kikuchi, Ryo Kurosaki, Shuzo Fujimura, and Hiroshi Yano "Pulse-modulated infrared-laser interferometric thermometry for Si substrate temperature measurement", Proc. SPIE 2336, Manufacturing Process Control for Microelectronic Devices and Circuits, (16 September 1994); https://doi.org/10.1117/12.186778

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available