Dispersive white-light profilometer

Johannes Schwider; Liang Zhou

doi:10.1117/12.195934

12 December 1994 Dispersive white-light profilometer

Johannes Schwider, Liang Zhou

Proceedings Volume 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements; (1994) https://doi.org/10.1117/12.195934
Event: International Conference on Interferometry '94, 1994, Warsaw, Poland

Abstract

We demonstrate a new type of a white light profilometer which combines a two-beam Fizeau- type interferometer with a grating spectrometer to realize absolute measurements of the surface profile with high accuracy. Two evaluation methods are discussed and the experimental results show that a measurement repeatability of 0.4 nm can be reached.

Citation Download Citation

Johannes Schwider and Liang Zhou "Dispersive white-light profilometer", Proc. SPIE 2340, Interferometry '94: New Techniques and Analysis in Optical Measurements, (12 December 1994); https://doi.org/10.1117/12.195934

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