Step height determination by a focused Gaussian beam

Danny Levy; Joseph Shamir; Yehuda Leviatan

doi:10.1117/12.211186

6 June 1995 Step height determination by a focused Gaussian beam

Danny Levy, Joseph Shamir, Yehuda Leviatan

Proceedings Volume 2426, 9th Meeting on Optical Engineering in Israel; (1995) https://doi.org/10.1117/12.211186
Event: Optical Engineering in Israel: 9th Meeting, 1994, Tel-Aviv, Israel

Abstract

The method of moments is used to investigate the interaction of a well focused laser beam with a step of a conducting surface. The two dimensional problem is solved by using a model of fictitious current filaments, while three-dimensional problems are treated by using a model of fictitious dipoles as the sources of the scattered field. Computer simulations indicate a difference between the two polarization components (TE,TM), but these differences are too small for practical measurements. The scattered field distribution is found to be highly dependent on the step height relative to the observation plane and on its position relative to the beam waist. Thus measurements of the intensity distribution in the observation plane can provide information about these parameters with high sensitivity. Experimental investigation confirms that step height, including its sign, i.e., hills or pits, as well as its position can be determined with an accuracy of about (lambda) /100.

Citation Download Citation

Danny Levy, Joseph Shamir, and Yehuda Leviatan "Step height determination by a focused Gaussian beam", Proc. SPIE 2426, 9th Meeting on Optical Engineering in Israel, (6 June 1995); https://doi.org/10.1117/12.211186

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