Multilayer x-ray mirrors for the objective crystal spectrometer on the Spectrum Roentgen Gamma satellite

Eric Louis; Eberhard Adolf Spiller; Salim Abdali; Finn Erland Christensen; Harm-Jan Voorma; Norbert B. Koster; Peter K. Frederiksen; Charles Tarrio; Eric M. Gullikson; Fred Bijkerk

doi:10.1117/12.212588

20 June 1995 Multilayer x-ray mirrors for the objective crystal spectrometer on the Spectrum Roentgen Gamma satellite

Eric Louis, Eberhard Adolf Spiller, Salim Abdali, Finn Erland Christensen, Harm-Jan Voorma, Norbert B. Koster, Peter K. Frederiksen, Charles Tarrio, Eric M. Gullikson, Fred Bijkerk

Author Affiliations +

Proceedings Volume 2515, X-Ray and Extreme Ultraviolet Optics; (1995) https://doi.org/10.1117/12.212588
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

We carried out experiments to determine the optimum parameters for the production of multilayer x-ray mirrors for the lambda equals 4.4 - 7.1 nm range using electron beam evaporation and ion-polishing. We report on the deposition of Co/C and Ni/C coatings, of which we polished the metal layers with Kr⁺- and Ar⁺- ions of 300, 500, and 1000 eV. We examined the effect of different polishing parameters on the smoothening of the Co- and Ni-layers. The in-situ reflectivity of lambda equals 3.16 nm during deposition and the ex-situ grazing incidence reflectivity of Cu-K_(alpha ) radiation (lambda equals 0.154 nm) were used to analyze the coatings. We found optimum performance of the mirrors when applying polishing for 40 s with 500 eV Kr⁺-ions at an angle of 20 degrees and an ion beam current of 20 mA. Using these parameters, we produced Co/C multilayer coatings on forty flat super-polished 6 multiplied by 6 cm² Si (111) crystals for the Objective Crystal Spectrometer on the Russian Spectrum Rontgen Gamma satellite. The coatings on the flight crystals have a period Lambda of 3.95 plus or minus 0.02 nm and a reflectivity of more than 8% averaged over s- and p-polarization over the entire wavelength range of interest. We present a detailed analysis of the coatings on the crystals.

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Eric Louis, Eberhard Adolf Spiller, Salim Abdali, Finn Erland Christensen, Harm-Jan Voorma, Norbert B. Koster, Peter K. Frederiksen, Charles Tarrio, Eric M. Gullikson, and Fred Bijkerk "Multilayer x-ray mirrors for the objective crystal spectrometer on the Spectrum Roentgen Gamma satellite", Proc. SPIE 2515, X-Ray and Extreme Ultraviolet Optics, (20 June 1995); https://doi.org/10.1117/12.212588

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