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16 October 1995 Broadband mirror for soft x-ray optics
Pavel E. Kondrashov, Igor S. Smirnov, Helena Novoselova, Alexander M. Baranov, V. V. Sleptsov
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Proceedings Volume 2517, X-Ray and EUV/FUV Spectroscopy and Polarimetry; (1995) https://doi.org/10.1117/12.224930
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States
Abstract
Multilayer interference structures (MIS) consisting of alternating diamond-like layers with different parameters were investigated. The structures with periods from 68 Angstrom up to 21 angstrom were obtained by ion-plasma methods. Properties of diamond-like MIS and diamond-like films were studied by x-ray diffraction measurements in the range 1.54 angstrom - 11.8 angstrom and ESCA. The numerical computations of reflecting ability of multilayer diamond-like structures were carried out. The difference between experimental and theoretical results are discussed. It is shown experimentally the feasibility of creating wideband mirrors for the soft x-ray range using diamond-like layers with different electron densities.
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Pavel E. Kondrashov, Igor S. Smirnov, Helena Novoselova, Alexander M. Baranov, and V. V. Sleptsov "Broadband mirror for soft x-ray optics", Proc. SPIE 2517, X-Ray and EUV/FUV Spectroscopy and Polarimetry, (16 October 1995); https://doi.org/10.1117/12.224930
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KEYWORDS
Mirrors
X-ray optics
Multilayer interference
Multilayers
X-ray diffraction
X-rays
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