Paper
16 October 1995 Spectrograph design using a transmission sliced multilayer as a diffraction element for the x-ray region
Michele Wilson, Muamer Zukic
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Abstract
Spectrograph designs are presented that utilize a transmission sliced multilayer as a diffraction and focusing element. The multilayer utilizes the coincidence of Bragg and diffraction orders to achieve higher efficiency and resolution than a conventional grating. Traditionally, the lattice spacing in a crystal is used to achieve dispersion in the x-ray region. However, a multilayer as a diffraction element has some significant advantages. The layer thicknesses can be adjusted for any wavelength and for any angle of incidence. The transmission sliced multilayer is a dispersion element that satisfies the desirable properties of spectroscopy: high dispersion, high throughput, and high resolution. The sliced multilayer grating with a variable period can be used for both dispersion and imaging. Designs are studied for 17 keV and 34 keV with applications in mammography and IC chip inspection.
© (1995) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Michele Wilson and Muamer Zukic "Spectrograph design using a transmission sliced multilayer as a diffraction element for the x-ray region", Proc. SPIE 2517, X-Ray and EUV/FUV Spectroscopy and Polarimetry, (16 October 1995); https://doi.org/10.1117/12.224909
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Cited by 2 scholarly publications.
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KEYWORDS
Diffraction

Spectrographs

X-rays

X-ray diffraction

Diffraction gratings

Crystals

Inspection

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