Refractive index profiling of planar optical waveguides using near-field scanning optical microscopy

Lisa Dhar; H. J. Lee; E. J. Laskowski; Steve K. Buratto; Chellappan Narayanan; Herman M. Presby; Charles C. Bahr; Phillip J. Anthony; Mark J. Cardillo

doi:10.1117/12.218696

6 September 1995 Refractive index profiling of planar optical waveguides using near-field scanning optical microscopy

Lisa Dhar, H. J. Lee, E. J. Laskowski, Steve K. Buratto, Chellappan Narayanan, Herman M. Presby, Charles C. Bahr, Phillip J. Anthony, Mark J. Cardillo

Author Affiliations +

Proceedings Volume 2535, Near-Field Optics; (1995) https://doi.org/10.1117/12.218696
Event: SPIE's 1995 International Symposium on Optical Science, Engineering, and Instrumentation, 1995, San Diego, CA, United States

Abstract

The refractive index profile of a straight channel phosphosilicate glass planar optical waveguide is obtained with high spatial resolution (approximately 0.25 micrometers ) using near- field scanning optical microscopy (NSOM). The optical intensity profile of the waveguide mode is measured by NSOM and the refractive index distribution is calculated from the measured intensity. The calculated refractive index distribution is in agreement with that expected from the fabrication procedure and provides evidence for phosphorous diffusion between the core and cladding regions.

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Lisa Dhar, H. J. Lee, E. J. Laskowski, Steve K. Buratto, Chellappan Narayanan, Herman M. Presby, Charles C. Bahr, Phillip J. Anthony, and Mark J. Cardillo "Refractive index profiling of planar optical waveguides using near-field scanning optical microscopy", Proc. SPIE 2535, Near-Field Optics, (6 September 1995); https://doi.org/10.1117/12.218696

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