Holographic interferometric microscope optimized by conjugate reconstruction

Oliver Kruschke; Guenther K.G. Wernicke

doi:10.1117/12.226717

10 November 1995 Holographic interferometric microscope optimized by conjugate reconstruction

Oliver Kruschke, Guenther K.G. Wernicke

Proceedings Volume 2647, International Conference on Holography and Correlation Optics; (1995) https://doi.org/10.1117/12.226717
Event: International Conference on Holography and Correlation Optics, 1995, Chernivsti, Ukraine

Abstract

A holographic interferometric microscope is presented, which performs a comfortable combination of the measurement accuracy of holographic interferometry and the imaging performance of a microscope objective. Conjugate reconstruction is used to separate the holographic recording setup and the microscopic observation arrangement. Furthermore an ideal optimized interferometer geometry can be achieved by conjugate reconstruction. Experimental results of investigations of microelectronic elements are demonstrated.

Citation Download Citation

Oliver Kruschke and Guenther K.G. Wernicke "Holographic interferometric microscope optimized by conjugate reconstruction", Proc. SPIE 2647, International Conference on Holography and Correlation Optics, (10 November 1995); https://doi.org/10.1117/12.226717

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