Inverse problem solution in ellipsometry

Lubov A. Zabashta; Oleg I. Zabashta

doi:10.1117/12.226157

3 November 1995 Inverse problem solution in ellipsometry

Lubov A. Zabashta, Oleg I. Zabashta

Proceedings Volume 2648, International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics; (1995) https://doi.org/10.1117/12.226157
Event: International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, 1995, Kiev, Ukraine

Abstract

Interactive graphic system 'ELLA' is described which is an integrated program packet for reverse problem solution in ellipsometry. The solutions stable to experimental errors are found by two algorithms: a simplex method under constraints and a regularizing iteration method. A developed graphic procedure kit includes display of graphic surface layers, their optical parameters, and all main results of intermediate calculations. Specialized graphic input functions allow us to change the parameters of a chosen solution method, the basic data, to enter new additional information, etc. On the examples of model structure of GaAs-oxide MAI capabilities in ellipsometry for determination of multilayer structure optical parameters are studied.

Citation Download Citation

Lubov A. Zabashta and Oleg I. Zabashta "Inverse problem solution in ellipsometry", Proc. SPIE 2648, International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, (3 November 1995); https://doi.org/10.1117/12.226157

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