Silicon integrated optic devices and micromechanical sensors based on ARROW

Arokia Nathan; Kamel Benaissa

doi:10.1117/12.236125

25 March 1996 Silicon integrated optic devices and micromechanical sensors based on ARROW

Arokia Nathan, Kamel Benaissa

Proceedings Volume 2686, Integrated Optics and Microstructures III; (1996) https://doi.org/10.1117/12.236125
Event: Photonics West '96, 1996, San Jose, CA, United States

Abstract

We review the design and fabrication considerations of the antiresonant reflecting optical waveguide (AR-ROW), including materials selection for IC and MEMS compatibility, and present a variety of IO devices and sensors based on the ARROW which we have developed, along with pertinent CAD tools. Examples presented include: directional couplers, thermo- optic modulators, and Mach-Zehnder interferometers (MZI), including micromachined MZIs for detection of mechanical signals.

Citation Download Citation

Arokia Nathan and Kamel Benaissa "Silicon integrated optic devices and micromechanical sensors based on ARROW", Proc. SPIE 2686, Integrated Optics and Microstructures III, (25 March 1996); https://doi.org/10.1117/12.236125

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