Debrisless laser-produced x-ray source with a gas puff target

Henryk Fiedorowicz; Andrzej Bartnik; Jerzy Kostecki; Miroslaw Szczurek

doi:10.1117/12.240482

27 May 1996 Debrisless laser-produced x-ray source with a gas puff target

Henryk Fiedorowicz, Andrzej Bartnik, Jerzy Kostecki, Miroslaw Szczurek

Proceedings Volume 2723, Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI; (1996) https://doi.org/10.1117/12.240482
Event: SPIE's 1996 International Symposium on Microlithography, 1996, Santa Clara, CA, United States

Abstract

A hot and dense plasma produced from a laser-irradiated gas puff target, created by pulsed injection of gas with a solenoid valve, offers the possibility to realize a debrisless x-ray point source for the x-ray lithography applications. This paper reports experimental investigations on the x-ray generation in 1-keV photon-energy range from a high-pressure gas puff xenon target irradiated with a laser pulse of 1-ns duration at intensities of about 10¹³ Wcm^-2. X-ray output in this range for the gas puff xenon target, estimated from the measurements made using the semiconductor detectors, was higher than x-ray output for a solid tellurium or iron target measured for the same conditions.

Citation Download Citation

Henryk Fiedorowicz, Andrzej Bartnik, Jerzy Kostecki, and Miroslaw Szczurek "Debrisless laser-produced x-ray source with a gas puff target", Proc. SPIE 2723, Electron-Beam, X-Ray, EUV, and Ion-Beam Submicrometer Lithographies for Manufacturing VI, (27 May 1996); https://doi.org/10.1117/12.240482

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