Dependence of the surface morphology and scattering of optical coatings on film material, substrate roughness, and deposition process

Stefan Jakobs; Torsten Feigl; Angela Duparre; Stephan Pichlmaier

doi:10.1117/12.246814

19 August 1996 Dependence of the surface morphology and scattering of optical coatings on film material, substrate roughness, and deposition process

Stefan Jakobs, Torsten Feigl, Angela Duparre, Stephan Pichlmaier

Author Affiliations +

Proceedings Volume 2776, Developments in Optical Component Coatings; (1996) https://doi.org/10.1117/12.246814
Event: Optical Instrumentation and Systems Design, 1996, Glasgow, United Kingdom

Abstract

Substrate properties, coating design, and deposition process determine the surface morphology of optical coatings. The contribution of each factor can be estimated by measuring the surface topography with a scanning force microscope (SFM) and calculating the power spectral density functions. We present results for oxide and fluoride coatings on well polished glass and silicon substrates. The scattering of the coatings is predicted by calculations based on SFM data and compared with results from angle resolved scattering measurements.

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Stefan Jakobs, Torsten Feigl, Angela Duparre, and Stephan Pichlmaier "Dependence of the surface morphology and scattering of optical coatings on film material, substrate roughness, and deposition process", Proc. SPIE 2776, Developments in Optical Component Coatings, (19 August 1996); https://doi.org/10.1117/12.246814

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