Large field of view surface microstructure measurements

James C. Wyant

doi:10.1117/12.2316263

1 September 1996 Large field of view surface microstructure measurements

James C. Wyant

Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 2778FY (1996) https://doi.org/10.1117/12.2316263
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of

Abstract

This paper describes a computerized interferometric microscope system for the measurement of surface microstructure in which high spatial resolution, small field of view (FOV), measurements of surface microstructure are stitched together to give highly accurate large FOV maps of surface microstructure. A FOV of several millimeters having micron spatial resolution and nanometer or better height resolution can be obtained.

Citation Download Citation

James C. Wyant "Large field of view surface microstructure measurements", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 2778FY (1 September 1996); https://doi.org/10.1117/12.2316263

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