From intelligent materials to smart sensors

Elvira Fortunato; Guilherme Lavareda; Rodrigo Martins; Fernando Soares; Luis Fernandes

doi:10.1117/12.237124

26 April 1996 From intelligent materials to smart sensors

Elvira Fortunato, Guilherme Lavareda, Rodrigo Martins, Fernando Soares, Luis Fernandes

Proceedings Volume 2779, 3rd International Conference on Intelligent Materials and 3rd European Conference on Smart Structures and Materials; (1996) https://doi.org/10.1117/12.237124
Event: 3rd International Conference on Intelligent Materials, 1996, Lyon, France

Abstract

A Linear array Thin Film Position Sensitive Detector (LTFPSD) based on hydrogenated amorphous silicon (a-Si:H) is proposed for the first time, taking advantage of the optical properties presented by a-Si:H devices we have developed a LTFPSD with 128 integrated elements able to be used in 3D inspections/measurements. Each element consists on a 1D LTFPSD, based on a p.i.n. diode produced in a conventional PECVD system, where the doped layers are coated with thin resistive layers to establish the required device equipotentials. By proper incorporation of the LTFPSD into an optical inspection camera it will be possible to acquire information about an object/surface, through the optical cross- section method. The main advantages of this system, when compared with the conventional CCDs, are the low complexity of hardware and software used and that the information can be continuously processed (analogue detection).

Citation Download Citation

Elvira Fortunato, Guilherme Lavareda, Rodrigo Martins, Fernando Soares, and Luis Fernandes "From intelligent materials to smart sensors", Proc. SPIE 2779, 3rd International Conference on Intelligent Materials and 3rd European Conference on Smart Structures and Materials, (26 April 1996); https://doi.org/10.1117/12.237124

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