Significant improvements in Long Trace Profiler measurement performance

Peter Z. Takacs; Cynthia J. Bresloff

doi:10.1117/12.259843

21 November 1996 Significant improvements in Long Trace Profiler measurement performance

Proceedings Volume 2855, High Heat Flux Engineering III; (1996) https://doi.org/10.1117/12.259843
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

Modifications made to the long trace profiler system at the Advanced Photon Source at Argonne National Laboratory have significantly improved the accuracy and repeatability of the instrument. THe use of a Dove prism in the reference beam path corrects for phasing problems between mechanical errors and thermally-induced system errors. A single reference correction now completely removes both error signals from the measured surface profile. The addition of a precision air conditioner keeps the temperature in the metrology enclosure constant to within +/- 0.1 degree C over a 24 hour period and has significantly improved the stability and repeatability of the system. We illustrate the performance improvements with several sets of measurements. The improved environmental control has reduced thermal drift error to about 0.75 microradian RMS over a 7.5 hour time period. Measurements made in the forward scan direction and the reverse scan direction differ by only about 0.5 microradian RMS over a 500mm trace length. We are now able to put 1- sigma error bar of 0.3 microradian on an average of 10 slope profile measurements over a 500mm long trace length, and we are now able to put a 0.2 microradian error bar on an average of 10 measurements over a 200mm trace length. The corresponding 1-sigma height error bar for this measurement is 1.1 nm.

Citation Download Citation

Peter Z. Takacs and Cynthia J. Bresloff "Significant improvements in Long Trace Profiler measurement performance", Proc. SPIE 2855, High Heat Flux Engineering III, (21 November 1996); https://doi.org/10.1117/12.259843

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