Phase-shifting techniques applied to unique applications

Chris L. Koliopoulos

doi:10.1117/12.245154

19 July 1996 Phase-shifting techniques applied to unique applications

Chris L. Koliopoulos

Proceedings Volume 2861, Laser Interferometry VIII: Applications; (1996) https://doi.org/10.1117/12.245154
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

The methods of phase shifting interferometry have been applied to a number of unique optical metrology instruments which demonstrates the power of phase detection.

Citation Download Citation

Chris L. Koliopoulos "Phase-shifting techniques applied to unique applications", Proc. SPIE 2861, Laser Interferometry VIII: Applications, (19 July 1996); https://doi.org/10.1117/12.245154

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