Optical properties of large area diffractive Fresnel-lenses with modified zone-geometry

Uwe D. Zeitner; Ernst-Bernhard Kley

doi:10.1117/12.256214

1 November 1996 Optical properties of large area diffractive Fresnel-lenses with modified zone-geometry

Uwe D. Zeitner, Ernst-Bernhard Kley

Proceedings Volume 2863, Current Developments in Optical Design and Engineering VI; (1996) https://doi.org/10.1117/12.256214
Event: SPIE's 1996 International Symposium on Optical Science, Engineering, and Instrumentation, 1996, Denver, CO, United States

Abstract

A special surface geometry of diffractive Fresnel-lenses, which is well adapted to the Cartesian working regime of most microlithographic machines is presented in this paper. Due to this adaptation the amount of data necessary for the description of the exposure and also the exposure-time decreases drastically and so the realization of large area diffractive lenses and lens-arrays became possible. In this paper we compare the modified lens-geometry with the common radially symmetrical diffractive Fresnel-lens and we show some experimental results which we obtained for a lens realized by electron-beam lithography.

Citation Download Citation

Uwe D. Zeitner and Ernst-Bernhard Kley "Optical properties of large area diffractive Fresnel-lenses with modified zone-geometry", Proc. SPIE 2863, Current Developments in Optical Design and Engineering VI, (1 November 1996); https://doi.org/10.1117/12.256214

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