Measurement and evaluation methods for beam characterization of commercial excimer lasers

Hans Stephen Albrecht; Ulrich Rebhan; Klaus R. Mann; J. Ohlenbusch

doi:10.1117/12.259918

20 November 1996 Measurement and evaluation methods for beam characterization of commercial excimer lasers

Hans Stephen Albrecht, Ulrich Rebhan, Klaus R. Mann, J. Ohlenbusch

Proceedings Volume 2870, Third International Workshop on Laser Beam and Optics Characterization; (1996) https://doi.org/10.1117/12.259918
Event: Third International Workshop on Laser Beam and Optics Characterization, 1996, Quebec City, Canada

Abstract

This paper describes the specific requirements for measurement of excimer laser beam profiles for standardized characterization 'of commercial excimer lasers. A corresponding measurement system is presented which allows a simultaneous characterization of energy density distribution in the near field as well as in the focal plane of a lens (far field). Specially adapted UV-cameras make possible sings pulse diagnostic. Beam widths are calculated from the digitized camera data by different methods corresponding to the proposals of ISO 11146 (second moment, moving knife edge, and moving slit) and the results are compared. In particular, the influence of background signals as well as the typical shape of energy density distribution in the near field to the determined beam widths are analyzed.

Citation Download Citation

Hans Stephen Albrecht, Ulrich Rebhan, Klaus R. Mann, and J. Ohlenbusch "Measurement and evaluation methods for beam characterization of commercial excimer lasers", Proc. SPIE 2870, Third International Workshop on Laser Beam and Optics Characterization, (20 November 1996); https://doi.org/10.1117/12.259918

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