Morphologies of laser-induced damage in hafnia-silica multilayer mirror and polarizer coatings

Francois Y. Genin; Christopher J. Stolz

doi:10.1117/12.259929

20 November 1996 Morphologies of laser-induced damage in hafnia-silica multilayer mirror and polarizer coatings

Francois Y. Genin, Christopher J. Stolz

Proceedings Volume 2870, Third International Workshop on Laser Beam and Optics Characterization; (1996) https://doi.org/10.1117/12.259929
Event: Third International Workshop on Laser Beam and Optics Characterization, 1996, Quebec City, Canada

Abstract

Hafnia-silica multilayer mirrors and polarizers were deposited by e-beam evaporation onto BK7 glass substrates. The mirrors and polarizers were coated for operation at a wavelength of 1053 nm at 45 degrees and at Brewster's angle (56 degrees), respectively. They were tested with a single 3-ns laser pulse. The morphology of the laser-induced damage was characterized by optical and scanning electron microscopy. Four distinct damage morphologies were found: pits, flat bottom pits, scalds, and delaminates. The pits and flat bottom pits (less than 30 micrometer in diameter) were detected at lower fluences (as low as 5 J/cm²). The pits seemed to result from ejection of nodular defects by causing local enhancement of the electric field. Scalds and delaminates could be observed at higher fluences (above 13 J/cm²) and seemed to result from the formation of plasmas on the surface. These damage types often originated at pits and were typically less than 300 micrometer in diameter; their size increased almost linearly with fluence. Finally, the effects of the damage on the characteristics of the beam (reflectivity degradation and phase modulations) were measured.

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Francois Y. Genin and Christopher J. Stolz "Morphologies of laser-induced damage in hafnia-silica multilayer mirror and polarizer coatings", Proc. SPIE 2870, Third International Workshop on Laser Beam and Optics Characterization, (20 November 1996); https://doi.org/10.1117/12.259929

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