Systems engineering approach to maintainability optimization with case studies on ion implanters and sputtering tools

Emiliano Girolami; Maurizio Mazzer

doi:10.1117/12.250895

13 September 1996 Systems engineering approach to maintainability optimization with case studies on ion implanters and sputtering tools

Emiliano Girolami, Maurizio Mazzer

Author Affiliations +

Proceedings Volume 2876, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II; (1996) https://doi.org/10.1117/12.250895
Event: Microelectronic Manufacturing 1996, 1996, Austin, TX, United States

Abstract

Systems engineering methods can be applied to almost any engineering task, this paper outlines the approach adopted to optimize maintenance activities in a wafer fab environment with applications on ion implanters and sputtering tools. The trade-off was to design an effective maintenance system keeping in mind the production requirements. The analysis phase identified areas of improvements in preventive maintenance (PM) scheduling, corrective maintenance (CM) control and reporting, logistic support management and equipment maintainability. All those tasks have been included in the work breakdown structure (WBS) and implemented. The results were a strong increase in equipment availability in the implanter's case and a reduction on failure rate for sputters. Future developments will consider the introduction of expert systems to help personnel in diagnoses and machine status control.

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Emiliano Girolami and Maurizio Mazzer "Systems engineering approach to maintainability optimization with case studies on ion implanters and sputtering tools", Proc. SPIE 2876, Process, Equipment, and Materials Control in Integrated Circuit Manufacturing II, (13 September 1996); https://doi.org/10.1117/12.250895

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