Study of cathodoluminescence spectroscopy of aluminum nitride

Fazla Rabbi M.B. Hossain; Xiao Tang; Kobchat Wongchotigul; Michael G. Spencer

doi:10.1117/12.250938

13 September 1996 Study of cathodoluminescence spectroscopy of aluminum nitride

Fazla Rabbi M.B. Hossain, Xiao Tang, Kobchat Wongchotigul, Michael G. Spencer

Proceedings Volume 2877, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III; (1996) https://doi.org/10.1117/12.250938
Event: Microelectronic Manufacturing 1996, 1996, Austin, TX, United States

Abstract

The cathodoluminescence (CL) measurements of carbon doped and undoped aluminum nitride (AlN) thin films near the band- edge region were performed at temperatures of 300, 77 and 4.2 K. These films were grown on three different substrates sapphire, 6H-SiC and 4H-SiC. The typical thickness of these films was in the range of 0.35 - 0.4 micrometer. Two distinct peaks 'A' and 'B' were observed in undoped samples around 6.1 and 5.9 eV, respectively. Also, there is an expected peak within the low energy side of peak 'B.' The absorption spectra of different carbon doped AlN on sapphire substrate were carried out to study the Urbach tail's parameters which play an important role near the band-edge transitions.

Citation Download Citation

Fazla Rabbi M.B. Hossain, Xiao Tang, Kobchat Wongchotigul, and Michael G. Spencer "Study of cathodoluminescence spectroscopy of aluminum nitride", Proc. SPIE 2877, Optical Characterization Techniques for High-Performance Microelectronic Device Manufacturing III, (13 September 1996); https://doi.org/10.1117/12.250938

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