Self-aligned processing techniques for semiconductor stripe lasers

Hongliang Zhu; Hartmut Hillmer

doi:10.1117/12.251900

24 September 1996 Self-aligned processing techniques for semiconductor stripe lasers

Hongliang Zhu, Hartmut Hillmer

Proceedings Volume 2886, Semiconductor Lasers II; (1996) https://doi.org/10.1117/12.251900
Event: Photonics China '96, 1996, Beijing, China

Abstract

In this article we will generalize and analyze different self-aligned techniques for different stripe lasers, for example: ridge waveguide lasers, buried heterostructure stripe lasers, mushroom-stripe lasers, etc. Finally, a novel self-aligned processing technique for fabricating buried mushroom-stripe lasers is proposed and it has been utilized successfully in fabricating bent waveguide mushroom-stripe MQW DFB lasers.

Citation Download Citation

Hongliang Zhu and Hartmut Hillmer "Self-aligned processing techniques for semiconductor stripe lasers", Proc. SPIE 2886, Semiconductor Lasers II, (24 September 1996); https://doi.org/10.1117/12.251900

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