Automatic calibration of height-setting micrometer by laser interferometry

Chenggen Quan; Gan Xu

doi:10.1117/12.269844

20 March 1997 Automatic calibration of height-setting micrometer by laser interferometry

Chenggen Quan, Gan Xu

Proceedings Volume 2921, International Conference on Experimental Mechanics: Advances and Applications; (1997) https://doi.org/10.1117/12.269844
Event: International Conference on Experimental Mechanics: Advances and Applications, 1996, Singapore, Singapore

Abstract

We have constructed a laser measurement system for automatic calibration of height setting micrometer. This automation is accomplished by an interactive software tool which performs essential calibration functions. The instrument incorporates a double frequency stabilized laser based on the heterodyne measurement technique. Positioning of height setting micrometer is undertaken by a X-Y stage driven by the servo motors and calibration is performed by combining laser and electronic probe readings. Abbe offset tilting error is eliminated by using the double-path interferometer scheme. The instrument has a capability of measurement range 0 - 350 mm, resolution 40 nm, expanded uncertainty of height measurement better than 0.5 micrometer at the 95% confidence level over the full range. The whole calibration procedure can be completed in two hours making it much more efficient than the conventional method of gauge block comparison. The instrument can also be applied to various linear measurements with high accuracy to reduce the measuring time and to simplify the measurement setup.

Citation Download Citation

Chenggen Quan and Gan Xu "Automatic calibration of height-setting micrometer by laser interferometry", Proc. SPIE 2921, International Conference on Experimental Mechanics: Advances and Applications, (20 March 1997); https://doi.org/10.1117/12.269844

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