Mechanical and thermal properties of cured film and temperature field simulation in CD multilayers

Yingmin Zhao; Congshan Zhu; Hao Wang

doi:10.1117/12.248693

3 September 1996 Mechanical and thermal properties of cured film and temperature field simulation in CD multilayers

Yingmin Zhao, Congshan Zhu, Hao Wang

Proceedings Volume 2931, Fourth International Symposium on Optical Storage (ISOS '96); (1996) https://doi.org/10.1117/12.248693
Event: Fourth International Symposium on Optical Storage, 1996, Shenzhen, Guangdong Province, China

Abstract

Mechanical and thermal properties of UV-cured acrylate film have been measured, which presents Young's module and glass transition temperature. Based on CDs' structure, temperature field simulation are carried out, influential factors are also discussed.

Citation Download Citation

Yingmin Zhao, Congshan Zhu, and Hao Wang "Mechanical and thermal properties of cured film and temperature field simulation in CD multilayers", Proc. SPIE 2931, Fourth International Symposium on Optical Storage (ISOS '96), (3 September 1996); https://doi.org/10.1117/12.248693

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available