High-resolution (<10-um) photon-counting intensified CCD

John V. Vallerga; Oswald H. W. Siegmund; Josef Dalcomo; Patrick N. Jelinsky

doi:10.1117/12.275171

25 April 1997 High-resolution (<10-μm) photon-counting intensified CCD

John V. Vallerga, Oswald H. W. Siegmund, Josef Dalcomo, Patrick N. Jelinsky

Proceedings Volume 3019, Solid State Sensor Arrays: Development and Applications; (1997) https://doi.org/10.1117/12.275171
Event: Electronic Imaging '97, 1997, San Jose, CA, United States

Abstract

We present the results of a development of a photon counting intensified CCD where single MCP events due to photon or particle detections are centroided to CCD subpixel accuracy. In this mode, we have ben able to resolve individual MCP 6 micron pores indicating the ultimate resolution of this device is limited by the microchannel pore spacing and not the readout technique. Using an EEV camera with a 512 by 512 CCD and a frame rate of 60 Hz, we achieve a global counting rate of 50,000 cts. per sec. The key to achieving rates this high for a 3 by 3 centroiding system is the identification of the pixel address of the event location in hardware using a dedicated convolution DSP and comparators which pass only valid events for the centroid calculation to downstream processors. We will also discuss the centroiding algorithm development and optimization and the corrections that must be applied for quantized and truncated sampling of the event charge distribution. At very high event rates the device may also be operated in analog mode with resolution.

Citation Download Citation

John V. Vallerga, Oswald H. W. Siegmund, Josef Dalcomo, and Patrick N. Jelinsky "High-resolution (<10-μm) photon-counting intensified CCD", Proc. SPIE 3019, Solid State Sensor Arrays: Development and Applications, (25 April 1997); https://doi.org/10.1117/12.275171

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