Paper
13 August 1997 64 x 64, 128 x 128, 240 x 320 pixel uncooled IR bolometric detector arrays
Hubert Jerominek, Timothy D. Pope, Martin Renaud, Nicholas R. Swart, Francis Picard, Mario Lehoux, Simon Savard, Ghislain Bilodeau, Danick Audet, Linh Ngo Phong, Chu Nong Qiu
Author Affiliations +
Abstract
Several prototypes of individual VO2-based bolometric detectors and their arrays consisting of 64 by 64, 128 by 128 and 240 by 320 pixels are presented. The fabrication method and the device characterization results are described. Three types of readout integrated circuits for the arrays are also presented. A custom vacuum package for the IR bolometric detector arrays is descried.
© (1997) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hubert Jerominek, Timothy D. Pope, Martin Renaud, Nicholas R. Swart, Francis Picard, Mario Lehoux, Simon Savard, Ghislain Bilodeau, Danick Audet, Linh Ngo Phong, and Chu Nong Qiu "64 x 64, 128 x 128, 240 x 320 pixel uncooled IR bolometric detector arrays", Proc. SPIE 3061, Infrared Technology and Applications XXIII, (13 August 1997); https://doi.org/10.1117/12.280342
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Cited by 6 scholarly publications.
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KEYWORDS
Sensors

Detector arrays

Metals

Readout integrated circuits

Infrared bolometers

Infrared detectors

Thin films

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