Three-dimensional analysis of machined surfaces by scatterometry

Jorg W. Baumgart; Horst Truckenbrodt

doi:10.1117/12.281151

17 September 1997 Three-dimensional analysis of machined surfaces by scatterometry

Jorg W. Baumgart, Horst Truckenbrodt

Proceedings Volume 3098, Optical Inspection and Micromeasurements II; (1997) https://doi.org/10.1117/12.281151
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany

Abstract

The analysis of scattered light is a well known method for the inspection of very smooth surfaces. Some new methods of data analysis have now widened its utilization to rough and very rough surfaces. Even if no generalized solutionis available it is possible to determine any surface parameter in certain applications. Especially for process control purposes, scatterometry can be a fast, contactless and reliable method to measure deviations form rated values and to detect machining errors. In this paper, the method and its application to honed, polished and turned surfaces are presented. Amplitude as well as spatial parameters of the surfaces microtopography will be determined and compared to those obtained by other methods.

Citation Download Citation

Jorg W. Baumgart and Horst Truckenbrodt "Three-dimensional analysis of machined surfaces by scatterometry", Proc. SPIE 3098, Optical Inspection and Micromeasurements II, (17 September 1997); https://doi.org/10.1117/12.281151

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