Integrated optical sources for microsystems

Joerg Mueller

doi:10.1117/12.281217

24 September 1997 Integrated optical sources for microsystems

Joerg Mueller

Author Affiliations +

Proceedings Volume 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications; (1997) https://doi.org/10.1117/12.281217
Event: Lasers and Optics in Manufacturing III, 1997, Munich, Germany

Abstract

Integrated optical wide band sources based on thermal and plasma emitters are expected to find broad applications in optical microsystems, e.g. for medical and experimental analysis. Presently only few designs have been investigated in spite of their promising properties with respect to low power consumption, high modulation frequencies, and self adjusting geometries. This paper presents on presently known designs, their fabrication technologies, and applicability e.g. to micro total analysis systems ((mu) tas). KHz- modulation for tungsten and polysilicon based thermal emitters for the near infrared and visible spectrum at powers in the milliwatt-range are obtained. Plasma emitters driven by DC-, RF- or (mu) W-generators work at powers as low as a few milliwatts and emit in the UV and visible spectrum. They can be used as light sources as well as e.g. directly as specimen specific plasma detectors in micro total analysis systems.

Citation Download Citation

Joerg Mueller "Integrated optical sources for microsystems", Proc. SPIE 3099, Micro-optical Technologies for Measurement, Sensors, and Microsystems II and Optical Fiber Sensor Technologies and Applications, (24 September 1997); https://doi.org/10.1117/12.281217

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