Iterative calculation, manufacture, and investigation of DOE forming unimodal complex amplitude distributions

Michael Rudolf Duparre; Vladimir S. Pavelyev; Barbara Luedge; Ernst-Bernhard Kley; Richard M. Kowarschik; Victor A. Soifer

doi:10.1117/12.281398

22 September 1997 Iterative calculation, manufacture, and investigation of DOE forming unimodal complex amplitude distributions

Michael Rudolf Duparre, Vladimir S. Pavelyev, Barbara Luedge, Ernst-Bernhard Kley, Richard M. Kowarschik, Victor A. Soifer

Author Affiliations +

Proceedings Volume 3110, 10th Meeting on Optical Engineering in Israel; (1997) https://doi.org/10.1117/12.281398
Event: 10th Meeting on Optical Engineering in Israel, 1997, Jerusalem, Israel

Abstract

We present results of iterative calculation, manufacturing and experimental as well as theoretical investigations of a novel diffractive optical element (DOE) which transforms a Gaussian TEM₀₀ input beam into a unimodal Gauss-Hermite (1,0) complex amplitude distribution. The iterative calculation procedure is based on the application of the method of generalized projections. The projection operator onto a set of modal functions is implemented through partition of the focal plane into a 'useful' and an 'auxiliary' domain. To improve the error reduction during the iterative calculation procedure, a stochastic predistortion in the auxiliary domain is chosen. This calculation results in a 2-D phase distribution which has to be transferred into an optical element. This element has been manufactured as a 16 level surface profile by (variable dose) electron-beam direct- writing into a PMMA resist film and a subsequent development procedure of the resist. Each of the generated 15 steps of the resist profile corresponds to a certain electron dose, comparable to a usual 'isobathic process' or a 'monotone etching method.' The final element consists of a fused silica substrate coated with the structured PMMA film. Both computational and experimental results are presented and demonstrate a good conformity with each other. Energy efficiency has been measured in the focal plane as 37.7%, compared with the calculated value of 45.5%. The achieved results show good prospects of such an approach for the formation of unimodal distributions.

Citation Download Citation

Michael Rudolf Duparre, Vladimir S. Pavelyev, Barbara Luedge, Ernst-Bernhard Kley, Richard M. Kowarschik, and Victor A. Soifer "Iterative calculation, manufacture, and investigation of DOE forming unimodal complex amplitude distributions", Proc. SPIE 3110, 10th Meeting on Optical Engineering in Israel, (22 September 1997); https://doi.org/10.1117/12.281398

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