Structure measurement of the CCD pixel using an x-ray beam

Hiroshi Tsunemi; Kumi Yoshita; Shunji Kitamoto; Emi Miyata

doi:10.1117/12.278892

15 October 1997 Structure measurement of the CCD pixel using an x-ray beam

Hiroshi Tsunemi, Kumi Yoshita, Shunji Kitamoto, Emi Miyata

Proceedings Volume 3114, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy VIII; (1997) https://doi.org/10.1117/12.278892
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

We report here the result of the structure measurement of a charge-coupled device (CCD) pixel with sub pixel resolution by using a new technique. The new technique makes use of a parallel x-ray beam and a metal mesh placed just in front of the CCD. The CCD camera we used in the first experiment, is a conventional system using the TC213 [Texas Instrument Japan (TIJ)] whose pixel size is 12 micrometers by 12 micrometers with one million pixels. The mesh has 4 micrometer diameter holes spaced at 12 micrometer intervals. We produced an efficiency map within a typical pixel showing the gate structure in detail. In the reconstruction process, we have to determine the mutual alignment between the CCD and the mesh in detail. The method we used can easily determine it with enough precision. By selecting single pixel events, we determined a pixel boundary. The distribution of two pixel split event can give us more information in the behavior of the primary charge cloud.

Citation Download Citation

Hiroshi Tsunemi, Kumi Yoshita, Shunji Kitamoto, and Emi Miyata "Structure measurement of the CCD pixel using an x-ray beam", Proc. SPIE 3114, EUV, X-Ray, and Gamma-Ray Instrumentation for Astronomy VIII, (15 October 1997); https://doi.org/10.1117/12.278892

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