Recording grooves for fiber-chip coupling in PMMA using KrF excimer laser radiation: experiment and simulation

Tomas R. Sterkenburgh; Hilmar Franke; M. G. Becker; W. Garen; Werner F. Frank

doi:10.1117/12.279147

22 September 1997 Recording grooves for fiber-chip coupling in PMMA using KrF excimer laser radiation: experiment and simulation

Tomas R. Sterkenburgh, Hilmar Franke, M. G. Becker, W. Garen, Werner F. Frank

Author Affiliations +

Proceedings Volume 3135, Precision Plastic Optics for Optical Storage, Displays, Imaging, and Communications; (1997) https://doi.org/10.1117/12.279147
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

Working with silica the technique of anisotropic etching produces 'V'-shaped grooves which are suitable for fiber chip coupling.In this paper similar grooves are fabricated in PMMA using self developing excimer-laser etching in combination with a cylindric lens. The actually fabricated shape ranging from 'V' to 'U' is investigated by different technical means. The dimensions are determined as a function of the parameter number of pulses. A multi pulse technique implying a lateral displacement is investigated for the fine tuning of the pattern. Simulations using two finite difference methods allow the theoretical prediction of etched patterns.

Citation Download Citation

Tomas R. Sterkenburgh, Hilmar Franke, M. G. Becker, W. Garen, and Werner F. Frank "Recording grooves for fiber-chip coupling in PMMA using KrF excimer laser radiation: experiment and simulation", Proc. SPIE 3135, Precision Plastic Optics for Optical Storage, Displays, Imaging, and Communications, (22 September 1997); https://doi.org/10.1117/12.279147

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