Ferroelectric thin films by sol-gel processing

Donald R. Uhlmann; Gimtong T. Teowee

doi:10.1117/12.284134

2 October 1997 Ferroelectric thin films by sol-gel processing

Donald R. Uhlmann, Gimtong T. Teowee

Proceedings Volume 3136, Sol-Gel Optics IV; (1997) https://doi.org/10.1117/12.284134
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

A wide range of ferroelectric and pyroelectric films have been synthesized using wet chemical processing techniques. With appropriate selection of composition and precursors, and with appropriate use of processing methods to develop desired microstructures, films with exceptional combinations of properties have been prepared. The present paper provides an overview of recent results obtained in our laboratories on ferroelectric and ZnO films, and on the integration of such films into device structures. Specific discussion is directed to the effects of chemistry and important processing variables on the structure and properties of the resulting films. Also discussed are the important aspects of device structures utilizing such films.

Citation Download Citation

Donald R. Uhlmann and Gimtong T. Teowee "Ferroelectric thin films by sol-gel processing", Proc. SPIE 3136, Sol-Gel Optics IV, (2 October 1997); https://doi.org/10.1117/12.284134

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