Sol-gel-derived LiTaO3 thin films: properties and applications

C. J. Chen; De-Yin Jeng; S. Raychaudhuri; S. Uematsu; Y. Hasegawa

doi:10.1117/12.284121

2 October 1997 Sol-gel-derived LiTaO₃ thin films: properties and applications

C. J. Chen, De-Yin Jeng, S. Raychaudhuri, S. Uematsu, Y. Hasegawa

Proceedings Volume 3136, Sol-Gel Optics IV; (1997) https://doi.org/10.1117/12.284121
Event: Optical Science, Engineering and Instrumentation '97, 1997, San Diego, CA, United States

Abstract

LiTaO₃ thin films were deposited on platinized silicon and silicon wafers by spin coating. Double alkoxides, dissolved in parent alcohols were used as the sol precursors. Five different organic ligands, R equals CH₃, C₂H₅, n- C₃H₇, i-C₃H₇, and n-C₄H₉ were selected to study their effect on preferred orientation in the crystallized phases of the sintered films, which were analyzed by the x-ray diffraction techniques. It was found that the different ligand types gave rise to changes in direction as well as degree of the preferred orientation. The influence of the ligands also varied with the film thickness. As the thickness of the films increased to greater than 200 nm, only the double ethoxide derived films on platinized Si can maintain good degree of preferred orientation at the [110] direction. Possible causes for these effects are discussed. As an example for its applications, a thin film device utilizing the pyroelectric properties of LiTaO₃ are briefly described.

Citation Download Citation

C. J. Chen, De-Yin Jeng, S. Raychaudhuri, S. Uematsu, and Y. Hasegawa "Sol-gel-derived LiTaO₃ thin films: properties and applications", Proc. SPIE 3136, Sol-Gel Optics IV, (2 October 1997); https://doi.org/10.1117/12.284121

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