Paper
14 September 1998 Planar laser and nonlinear optical waveguides fabricated by pulsed laser deposition
Minoru Obara, Kyoichi Adachi, Tetsu Hasegawa, Akihiko Machida, Sachiyo Fukaya, Hiroshi Kumagai, Katsumi Midorikawa
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Abstract
Using KrF laser ablation the fabrication of Yb:YAG, and Cr:YAG planar waveguides as well as nonlinear Co:BaTiO3 waveguide has been carried out. The waveguide structure was fabricated by deposition of a rare-earth-doped YAG layer on an undoped substrate. The optical waveguide was characterized by optical absorption spectra, photoluminescence spectral intensity, optical propagation loss, and valence state by XPS. Co:BaTiO3 nonlinear optical, thin films have been fabricated with good quality using a new hybrid process of two-target pulsed laser deposition and in-situ pulsed laser annealing. Epitaxial Co:BaTiO3 films with Co/Ti concentrations of up to 5% were achieved by this method. Particles on the growing film were almost eliminated by in-situ laser annealing. Cobalt dopant concentrations were easily adjusted and controlled.
© (1998) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Minoru Obara, Kyoichi Adachi, Tetsu Hasegawa, Akihiko Machida, Sachiyo Fukaya, Hiroshi Kumagai, and Katsumi Midorikawa "Planar laser and nonlinear optical waveguides fabricated by pulsed laser deposition", Proc. SPIE 3343, High-Power Laser Ablation, (14 September 1998); https://doi.org/10.1117/12.321606
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Cited by 1 scholarly publication.
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KEYWORDS
Thin films

Waveguides

Pulsed laser deposition

YAG lasers

Laser ablation

Annealing

Crystals

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