Ellipsometric probing of metallic mirrors with modified surfaces

Leonid V. Poperenko; Vladimir S. Voitsenya; M. V. Vinnichenko

doi:10.1117/12.306202

20 April 1998 Ellipsometric probing of metallic mirrors with modified surfaces

Leonid V. Poperenko, Vladimir S. Voitsenya, M. V. Vinnichenko

Author Affiliations +

Proceedings Volume 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997; (1998) https://doi.org/10.1117/12.306202
Event: International Conference on Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics, 1997, Kiev, Ukraine

Abstract

Optical characterization of the Cu²⁺, Al²⁺ and Cr²⁺ ions implanted copper, aluminum and stainless steel mirrors respectively as well as the stainless steel mirrors with boron coatings was carried out by multiple angle of incidence ellipsometry. Both implanted and nonimplanted areas for aluminum, copper and stainless steel mirrors was then sputtered and probed. Changes of the optical properties of the stainless steel samples after bombardment by Cr²⁺ would occur due to the formation of a carbon layer on a mirror surface after the implantation, without modification of a microstructure of the surface. In case of the copper mirrors, irradiated by Cu²⁺ ions and aluminum mirrors implanted by Al²⁺ ions, the changes of optical parameters would be associated with modification of the subsurfaces layers' microstructure. The optical parameters and thicknesses of boron films on the stainless steel substrate were determined and were 7.3 nm and 16.8 nm respectively.

Citation Download Citation

Leonid V. Poperenko, Vladimir S. Voitsenya, and M. V. Vinnichenko "Ellipsometric probing of metallic mirrors with modified surfaces", Proc. SPIE 3359, Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics 1997, (20 April 1998); https://doi.org/10.1117/12.306202

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