Development of a high-power TEA CO2 laser pumped by an all-solid state exciter and its application to new material processing

Minoru Obara; Hiroyuki Yabe; Katsumi Midorikawa

doi:10.1117/12.311964

29 June 1998 Development of a high-power TEA CO₂ laser pumped by an all-solid state exciter and its application to new material processing

Minoru Obara, Hiroyuki Yabe, Katsumi Midorikawa

Author Affiliations +

Proceedings Volume 3403, International Conference on Atomic and Molecular Pulsed Lasers II; (1998) https://doi.org/10.1117/12.311964
Event: International Conference on Atomic and Molecular Pulsed Lasers, 1997, Tomsk, Russian Federation

Abstract

An average laser output power as high as 5 kW has been produced from a TEA CO₂ laser pumped with a new solid state exciter. The exciter providing a 100 J transfer energy consisted of a high voltage pulse generator and a two stage magnetic pulse compressor. A sophisticated discharge head was equipped with the corona preionization with acoustic dampers. A maximum average laser power of 4.6 kW was attained at a repetition rate of 550 Hz with an overall efficiency as high as 10.5%. A maximum repetition rate achieved was 1.1 kHz, at which the corresponding laser output was 3.4 kW. New TEA CO₂ laser applications to material processing include organic material ablation, semiconductor material ablation, ceramic ablations and aluminum conductor line writing on aluminum nitride ceramic.

Citation Download Citation

Minoru Obara, Hiroyuki Yabe, and Katsumi Midorikawa "Development of a high-power TEA CO₂ laser pumped by an all-solid state exciter and its application to new material processing", Proc. SPIE 3403, International Conference on Atomic and Molecular Pulsed Lasers II, (29 June 1998); https://doi.org/10.1117/12.311964

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