Characterization of integrated optical waveguides based on oxidized porous silicon

M. Balucani; V. Bondarenko; N. Kasuchits; G. Lamedica; N. Vorozov; A. Ferrari

doi:10.1117/12.312660

2 July 1998 Characterization of integrated optical waveguides based on oxidized porous silicon

M. Balucani, V. Bondarenko, N. Kasuchits, G. Lamedica, N. Vorozov, A. Ferrari

Proceedings Volume 3405, ROMOPTO '97: Fifth Conference on Optics; (1998) https://doi.org/10.1117/12.312660
Event: ROMOPTO '97: Fifth Conference on Optics, 1997, Bucharest, Romania

Abstract

Integrated optical waveguides based on oxidized porous silicon were fabricated by means of traditional silicon technology. Near- field pattern and out-of-plane scattering losses were measured to characterize optical properties of the waveguides. Strong confinement of light within the core of the waveguides as well as optical losses of about 5 dB/cm have been demonstrated in the visible range. The achieved results make the waveguides promising in optoelectronics use.

Citation Download Citation

M. Balucani, V. Bondarenko, N. Kasuchits, G. Lamedica, N. Vorozov, and A. Ferrari "Characterization of integrated optical waveguides based on oxidized porous silicon", Proc. SPIE 3405, ROMOPTO '97: Fifth Conference on Optics, (2 July 1998); https://doi.org/10.1117/12.312660

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