Solarization of AlF3-based fluoride glasses for VUV optics by ArF excimer laser irradiation

Hideo Hosono; Tomoaki Ichimura; Masafumi Mizuguchi; Hiroshi Kawazoe; Yoshikane Shinkuma; Yuichi Watanabe; Tohru Ogawa

doi:10.1117/12.323760

23 September 1998 Solarization of AlF₃-based fluoride glasses for VUV optics by ArF excimer laser irradiation

Hideo Hosono, Tomoaki Ichimura, Masafumi Mizuguchi, Hiroshi Kawazoe, Yoshikane Shinkuma, Yuichi Watanabe, Tohru Ogawa

Proceedings Volume 3424, Inorganic Optical Materials; (1998) https://doi.org/10.1117/12.323760
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

Color center formation in AlF₃-YF₃-RF₂ (R equals alkaline earth metal) glasses doped with PO_2.5 (0 - 3 mol %) by irradiation with ArF excimer laser light was examined by optical absorption (vuv-visible) and electron paramagnetic resonance spectroscopies. Impurity iron ions and oxygens in the samples were 0.2 ppm and 440 ppm, respectively. Optical absorption ranging from 2 - 8 eV was induced via one-photon absorption processes. The optical band dominating the transmission loss at 193 nm has the peak at 5 eV in the P-free glasses or the peak at 6.9 eV in the doped glasses. The origins of the 5 ev-band and the 6.9-ev were tentatively ascribed to an oxygen-related hole center giving an EPR signal at g equals 2.0097 and PE'-center giving a hyperfine doublet with a separation of approximately 70 mT. The oscillator strengths of the 5-ev band and the 6.9-ev band were calculated as approximately 0.2 and approximately 0.13, the latter being close to that of Si E'-center. No formation of color centers associated with Al, Y, R and F ions was observed. The present results suggest that the reduction of impurity oxygen is a route to effectively suppress the solarization in the P-free AlF₃-based glasses.

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Hideo Hosono, Tomoaki Ichimura, Masafumi Mizuguchi, Hiroshi Kawazoe, Yoshikane Shinkuma, Yuichi Watanabe, and Tohru Ogawa "Solarization of AlF₃-based fluoride glasses for VUV optics by ArF excimer laser irradiation", Proc. SPIE 3424, Inorganic Optical Materials, (23 September 1998); https://doi.org/10.1117/12.323760

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