Uncertainties in the measurement of gauge blocks by interferometry

Yu-Pin Lan; Wei-Cheng Chang

doi:10.1117/12.323114

30 September 1998 Uncertainties in the measurement of gauge blocks by interferometry

Yu-Pin Lan, Wei-Cheng Chang

Proceedings Volume 3477, Recent Developments in Optical Gauge Block Metrology; (1998) https://doi.org/10.1117/12.323114
Event: SPIE's International Symposium on Optical Science, Engineering, and Instrumentation, 1998, San Diego, CA, United States

Abstract

The uncertainties in the measurement of gauge blocks by interferometry based on the official publication of the ISO 'Guide to the Expression of Uncertainty in Measurement', are evaluated. The effects caused by a variety of factors such as laser frequency, refractive index of air, temperature and wringing film thickness are analyzed. The evaluation results how that for steel gauge blocks of grade 00, the expanded uncertainty is 0.04 micrometers + 14 X 10^-7L where L is the length of the gauge block. The reported uncertainty is based on a standard uncertainty multiplied by a coverage factor of k equals 1.96, which provides a level of confidence of 95 percent.

Citation Download Citation

Yu-Pin Lan and Wei-Cheng Chang "Uncertainties in the measurement of gauge blocks by interferometry", Proc. SPIE 3477, Recent Developments in Optical Gauge Block Metrology, (30 September 1998); https://doi.org/10.1117/12.323114

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