Fabrication of binary microlens array by excimer laser micromachining

Frank H. S. Lin; J. H. Huang; Eric H. Y. Chou; Chii-Rong Yang; Bruce C. S. Chou; Roger G. S. Luo; Wen-Kai Kuo; Jer-Wei Chang; Mao-Hong Lu; Wen-Hsiung Huang; Chien-Jen Chen

doi:10.1117/12.324323

31 August 1998 Fabrication of binary microlens array by excimer laser micromachining

Frank H. S. Lin, J. H. Huang, Eric H. Y. Chou, Chii-Rong Yang, Bruce C. S. Chou, Roger G. S. Luo, Wen-Kai Kuo, Jer-Wei Chang, Mao-Hong Lu, Wen-Hsiung Huang, Chien-Jen Chen

Author Affiliations +

Proceedings Volume 3511, Micromachining and Microfabrication Process Technology IV; (1998) https://doi.org/10.1117/12.324323
Event: Micromachining and Microfabrication, 1998, Santa Clara, CA, United States

Abstract

A novel technique to fabricate binary microlens on polymer substrates by 248 nm KrF excimer laser micromachining is proposed. A successfully fabricated eight-level binary microlens with diameter 1.25 mm and focal length 43 mm on polycarbonate (PC) sheet is also reported. Using this technique, microlens patterns are mask-projected on the polymer materials via the laser ablation effect instead of complicated multi-stepped lithography and etching processes. Moreover, the precise ablated depth of microlens can be achieved by adequately controlling the number of laser pulses. In order to reduce alignment complexity and offset, multiple mask patterns are produced in one quartz plate and the mask holder is loaded by a servo-controlled x-y stage. SEM pictures and optical interference inspections show that the etched surface and sidewall have roughness deviation less than 30 nm, which is compatible with those results obtained by other techniques. This technique can fabricate a 2 X 2 array of eight-level binary microlens in about several seconds. He-Ne laser and proper optics arrangements are used to measure the diffraction efficiency of the fabricated devices. Experimental results show that the unique technique can produce the multi- level microlens with submicrometer feature size, high-quality surface morphology, and satisfactory optical characteristics.

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Frank H. S. Lin, J. H. Huang, Eric H. Y. Chou, Chii-Rong Yang, Bruce C. S. Chou, Roger G. S. Luo, Wen-Kai Kuo, Jer-Wei Chang, Mao-Hong Lu, Wen-Hsiung Huang, and Chien-Jen Chen "Fabrication of binary microlens array by excimer laser micromachining", Proc. SPIE 3511, Micromachining and Microfabrication Process Technology IV, (31 August 1998); https://doi.org/10.1117/12.324323

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KEYWORDS

Binary data

Microlens

Excimer lasers

Microlens array

Micromachining

Fabrication

Photomasks

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