Modeling of microforces in micro-object handling

Leon Benmayor; Sandra Koelemejier; Jacques Jacot

doi:10.1117/12.325736

5 October 1998 Modeling of microforces in micro-object handling

Leon Benmayor, Sandra Koelemejier, Jacques Jacot

Proceedings Volume 3519, Microrobotics and Micromanipulation; (1998) https://doi.org/10.1117/12.325736
Event: Photonics East (ISAM, VVDC, IEMB), 1998, Boston, MA, United States

Abstract

It is well known that due to scale effects micro systems are frequently confronted with problems caused by surface tension induced forces, electrostatic forces, etc. because their magnitude prevails over the volumetric forces. Micro- assembly processes are especially affected by this problem since detecting and applying forces in an adequate manner is essential for an assembly operation to be a success. In order to apply the forces in a correct way we need to know what their magnitude, direction, point of application and instant at which they must be applied are. In this paper we present a technique which allows us to describe the different forces that appear in the micro-assembly domain. The role played by the different forces in an assembly operation varies quantitatively but not qualitatively as the size of the assembled parts increases or decreases. By combining dimensional analysis, similitude laws and real measurements we try to understand the behavior of the forces present in the micro-system domain. Real measurements are performed on a force detection system especially designed. The main features of this system are: simultaneous detection of forces in two directions and capability of measuring forces dynamically. Those features allow us to describe the forces that appear when inserting a pin in a hole, the forces originated by the surface tension of glue on a chip while it is approached to its final position, etc. The results obtained show that some of the forces measured are strongly influenced by parameters different from those that prevail in larger object manipulations.

Citation Download Citation

Leon Benmayor, Sandra Koelemejier, and Jacques Jacot "Modeling of microforces in micro-object handling", Proc. SPIE 3519, Microrobotics and Micromanipulation, (5 October 1998); https://doi.org/10.1117/12.325736

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