High-accuracy optical prismatic scanner and its application to the measurement of large-axle angularity

Xianhe Zhang; Youbin Fang; Jiaxiong Ye

doi:10.1117/12.318383

10 August 1998 High-accuracy optical prismatic scanner and its application to the measurement of large-axle angularity

Xianhe Zhang, Youbin Fang, Jiaxiong Ye

Proceedings Volume 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II; (1998) https://doi.org/10.1117/12.318383
Event: Photonics China '98, 1998, Beijing, China

Abstract

The principle and structure of linear rectangular prismatic scanner are analyzed. The linear scanning shift-mathematic model of the scanner is derived in this paper. By analyzing, we show that if the parameters of the scanner is selected correctly, the maximum linear scanning deviation can be controlled in a small interval. The angularity measurement accuracy of large axle can reach submicrometer level.

Citation Download Citation

Xianhe Zhang, Youbin Fang, and Jiaxiong Ye "High-accuracy optical prismatic scanner and its application to the measurement of large-axle angularity", Proc. SPIE 3558, Automated Optical Inspection for Industry: Theory, Technology, and Applications II, (10 August 1998); https://doi.org/10.1117/12.318383

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