Emerging fabrication methods for diffractive optical elements

Thomas J. Suleski; Betty Baggett; William F. Delaney; Alan D. Kathman

doi:10.1117/12.349339

1 June 1999 Emerging fabrication methods for diffractive optical elements

Thomas J. Suleski, Betty Baggett, William F. Delaney, Alan D. Kathman

Proceedings Volume 3633, Diffractive and Holographic Technologies, Systems, and Spatial Light Modulators VI; (1999) https://doi.org/10.1117/12.349339
Event: Optoelectronics '99 - Integrated Optoelectronic Devices, 1999, San Jose, CA, United States

Abstract

New applications for diffractive optics and increasing demand for volume production of components have been motivating forces behind advances in fabrication technology for diffractive optical elements. The most common fabrication methods include the multiple masking and etching approach developed at MIT's Lincoln Labs in the mid 1980's, laser or electron-beam direct writing, diamond turning, and holographic exposure. Replication of optical components using embossing or injection molding techniques is relatively common. While all these methods are well established and have their own respective advantages and disadvantages, researchers have continued to explore new fabrication methods. Three techniques with a great deal of promise for diffractive optics fabrication include grayscale lithography, near-field holography, and methods of so called `soft lithography'. Each of these techniques offers the potential to reduce fabrication costs, improve performance, or allow new applications of diffractive technology. In this paper, we will present results of research performed on these fabrication methods and discuss advantages and disadvantages of the various techniques.

Citation Download Citation

Thomas J. Suleski, Betty Baggett, William F. Delaney, and Alan D. Kathman "Emerging fabrication methods for diffractive optical elements", Proc. SPIE 3633, Diffractive and Holographic Technologies, Systems, and Spatial Light Modulators VI, (1 June 1999); https://doi.org/10.1117/12.349339

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available