Paper
21 July 1999 Self-affine scaling analysis of coating structure
Mark A. Johnson, Paul J. Cote
Author Affiliations +
Abstract
This paper describes a new numerical technique for quantitative characterization of rough surface in terms of self-affine fractal measures using non-planar reference surfaces. The algorithm is used to extract the scaling properties of coating surfaces to provide insight into the deposition process by characterizing the condition of the substrate, the evolving surface morphology, and the bulk coating properties for a selection of deposition/sputtering parameters. We have employed these numerical technique to analyze the surface topography of a variety of coatings in an effort to better understand the intrinsic structure and to determine if a correlation exists between the deposition parameters the surface topography. Our results indicate that the coating structures are consistent wit a self-affine fractal description and the extracted fractal measures are sensitive to the variations in the deposition parameters.
© (1999) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mark A. Johnson and Paul J. Cote "Self-affine scaling analysis of coating structure", Proc. SPIE 3716, Visual Information Processing VIII, (21 July 1999); https://doi.org/10.1117/12.354692
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Cited by 1 scholarly publication.
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KEYWORDS
Coating

Fractal analysis

Deposition processes

Correlation function

Process control

Statistical analysis

Surface finishing

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