Surface roughness and subsurface damage characterization of fused silica substrates

Andreas Wuttig; Joerg Steinert; Angela Duparre; Horst Truckenbrodt

doi:10.1117/12.360168

6 September 1999 Surface roughness and subsurface damage characterization of fused silica substrates

Andreas Wuttig, Joerg Steinert, Angela Duparre, Horst Truckenbrodt

Proceedings Volume 3739, Optical Fabrication and Testing; (1999) https://doi.org/10.1117/12.360168
Event: Optical Systems Design and Production, 1999, Berlin, Germany

Abstract

The surface microtopography and subsurface damage of fused silica have been examined after different stages of the manufacturing process. Results are presented of etching experiments and measurements performed by white light interferometry, atomic force microscopy and total light scattering.

Citation Download Citation

Andreas Wuttig, Joerg Steinert, Angela Duparre, and Horst Truckenbrodt "Surface roughness and subsurface damage characterization of fused silica substrates", Proc. SPIE 3739, Optical Fabrication and Testing, (6 September 1999); https://doi.org/10.1117/12.360168

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available