Strategy and tools for yield enhancement

Miguel Recio

doi:10.1117/12.346905

27 April 1999 Strategy and tools for yield enhancement

Miguel Recio

Proceedings Volume 3743, In-Line Characterization, Yield Reliability, and Failure Analyses in Microelectronic Manufacturing; (1999) https://doi.org/10.1117/12.346905
Event: Microelectronic Manufacturing Technologies, 1999, Edinburgh, United Kingdom

Abstract

We present an overview on yield enhancement in a semiconductor manufacturing environment. We discuss about the technical and strategic aspects of this field. On the technical side we deal with yield metrics definitions and yield analysis tools. The strategic side includes the work of quantifying and prioritize yield loss issues. Communication of yield to other organizations, that will be involved in the team work for the search of root cause identification and corrective and preventative action plans, is a key to a successful and sustained yield enhancement. The importance of moving from end-of-line yield enhancement standpoint to a more in-line view is also outlined.

Citation Download Citation

Miguel Recio "Strategy and tools for yield enhancement", Proc. SPIE 3743, In-Line Characterization, Yield Reliability, and Failure Analyses in Microelectronic Manufacturing, (27 April 1999); https://doi.org/10.1117/12.346905

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